Defense of a doctoral thesis Jihoon Choi for the University of Grenoble, speciality Nanoelectronics and NanoTechnlologies (NEET) intitled:
Amphithéatre M001 Phelma/ MINATEC/Grenoble-INP 3 rue Parvis Louis Néel - GRENOBLE
Silicon carbide nanowires: from fabrication to related devices.
Mr Jihoon CHOI
Thursday 21st March 2013 at 10:00
This thesis focuses on the development of new methodologies and design strategies for the fabrication of SiC nanostructures and SiC nanodevices. Single crsytalline SiC nanostructures with controlled doping have been elaborated based on the top-down approach. The obtained SiC nanopillars exhibit high anisotropy features (6.4) with a large etch depth (>7 m). The etching behavior of SiC nanopillars depending on the different polytypes and crystallographic orientations have also been investigated. The morphologies of SiC nanopillars show different shapes (triangle, rhumbus and hexagon) according to the SiC polytypes and crystalline orientations. The electrical properties of the nanowire Field Effect Transistors based on these SiC nanostructures obtained by top-down approach show higher carrier mobility than the best values reported in the literature.
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Thesis prepared in the laboratory IMEP-LAHC and LTM supervised by sous Mrs Edwige BANO and Mrs Laurence LATU-ROMAIN.