PhD student
Contact details
- Tél. : 04.56.52.94.90
- Fax : 04.56.52.95.01
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Research activities
Equipe: CMNE in collaboration with PHOTO
Thesis entitled by: Second harmonic generation for semiconductor materials and interfaces characterization
The objective of this PhD is to develop an innovative characterization method for multi-layers of high-k dielectrics used for silicon passivation. The method uses the second-harmonic generation (SHG), which is a non-linear optics phenomenon. The particularity of the SHG generated by centrosymmetric materials (such as Si, Al2O3, HfO2…) is that the signal, mainly coming from interfaces contributions, is very sensitive to the electrical field present there. For image sensors, both high interface quality and field-effect passivation are required and both of them can actually be measured by the SHG. Two key elements that we will deal with during the thesis: : (1) deconvolution of optical propagation phenomena in order to access electrical properties of the interface and (2) calibration of the SHG using other electrical measurements such as capacitance versus voltage on structures specifically fabricated in clean-room.
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Date of update June 13, 2023