HF measurements techniques,materials characterization, integrated passive devices & 3D integration
Research activities are performed according to four complementary topics, from materials and measurement techniques to elementary devices and their applications.
1- High frequency measurement methods:
Calibration and de-embedding techniques for integrated device characterization
Wideband characterization techniques (DC to 110 GHz) of materials
In-situ techniques for characterization of very thin films (nm) to bulk (mm) materials
2- Characterization of materials for integrated devices, sensors, printed electronics devices and MEMS :
Characterization of dielectric materials, from ultra low-k to very high-k dielectrics, porous oxides as SiOCH, oxides as HfO2, ZrO2, TiTaO and perovskite dielectrics...
Characterization of ferroelectric and piezoelectric materials as AlN, KTN, BST and PZT...
Characterization of semiconductor and conductor materials
Characterization of printed electronics materials (inks, papers)
3- Development, design and characterization of new integrated passive devices and MEMS
3D RF MIM capacitors, new high density 3D capacitors (TSC, Nanowires capacitors)
High performance and tunable integrated capacitors
High speed Interconnections for sub-45 nm CMOS nodes
MEMS and sensors
4- 3D Integrated Circuits (3D-IC) and 3D packaging
Modelling and characterisation of TSV, Pillars and RDL interconnections
Architectures of 3D passives in 3D-IC stacks
3D interposer technologies
High speed interconnection channels for 3D integration (Wide I/O, HDMI...)