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Nano-scaled Measurements - Grenoble INP - IMEP-LAHC

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Nano-scaled Measurements


  • 1 AFM (Atomic Force Microscopy): classical topography modes (Tapping and Contact), plus electrical modes (EFM, SCM, TUNA, C-AFM).
Atomic Force Microscopy

  • Optical vibrometer (Fogale): A pretty good resolution in the topography mode
    (A few nm), and in addition, the capacity to analyze your microsystems dynamically (Resonance and harmonic frequencies...).

    Profilomètre optique Fogale



 
IMEP-LAHC - UMR 5130
Site Grenoble
Grenoble INP - Minatec : 3, Parvis Louis Néel - CS 50257 - 38016 Grenoble Cedex 1

Site Chambéry
Université de Savoie - F73376 Le Bourget du Lac Cedex Copyright Grenoble INP