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Nano-scaled Measurements - Grenoble INP - IMEP-LAHC

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Nano-scaled Measurements

  • 1 AFM (Atomic Force Microscopy): classical topography modes (Tapping and Contact), plus electrical modes (EFM, SCM, TUNA, C-AFM).
Atomic Force Microscopy

  • Optical vibrometer (Fogale): A pretty good resolution in the topography mode
    (A few nm), and in addition, the capacity to analyze your microsystems dynamically (Resonance and harmonic frequencies...).

    Profilomètre optique Fogale

Site Grenoble
Grenoble INP - Minatec : 3, Parvis Louis Néel - CS 50257 - 38016 Grenoble Cedex 1

Site Chambéry
Université de Savoie - F73376 Le Bourget du Lac Cedex Copyright Grenoble INP