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Microelectronics, electromagnetism, photonics , microwave

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Nano-scaled Measurements


  • 1 AFM (Atomic Force Microscopy): classical topography modes (Tapping and Contact), plus electrical modes (EFM, SCM, TUNA, C-AFM).
Atomic Force Microscopy

  • Optical vibrometer (Fogale): A pretty good resolution in the topography mode
    (A few nm), and in addition, the capacity to analyze your microsystems dynamically (Resonance and harmonic frequencies...).

    Profilomètre optique Fogale



Written by Brigitte Rasolofoniaina

Date of update June 18, 2009

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Chambéry site
Université de Savoie - F73376 Le Bourget du Lac Cedex
 


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