Defense of the doctoral thesis of Louise DE CONTI , for the University Grenoble Alpes , speciality "NANO ELECTRONICS & NANO TECHNOLOGIES ", entitled:
Amphi M001 -Phelma -Minatec
3 rue parvis Louis Néel
38016 Grenoble cedex1
« Design of 3D protection against electrostatic discharges (ESD) in advanced silicon on insulator FD-SOI thin film multilayer technology »
Louise DE CONTI
Wednesday, octobet 2nd, 2019 at 10:30
'The thesis objective was to design protection devices against electrostatic discharges (ESD) in the silicon thin-film using the 28 nm node ultra-thin Body and Buried Oxide (UTBB) Fully Depleted Silicon-On-Insulator (FD-SOI) technology with high-k metal gate. Existing devices were studied and new technological solutions were proposed to improve them. Besides, new devices were elaborated. 3D TCAD simulation was used for understanding their electrical behavior. Silicon characterization were performed to verify the response of devices to typical ESD tests. This work paves the way of innovative ESD protection devices built in the thin film with a special care given to 3D concerns, such as (i) the possibility of implementing the protection in a 3D monolithic integrated circuit, (ii) building a matrix as a protection device, and (iii) merging different devices such as benefiting from a 3D conduction of current.
Members of jury :
Philippe GALY : Supervisor
Sorin CRISTOLOVEANU : Co-supervisor
Maud VINET : Co-supervisor
Dionyz POGANY : Reviewer
Bruno ALLARD : Reviewer
Nathalie LABAT : Examiner .
Jean-Pierre COLINGE : Examiner
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Thesis prepared in the laboratory : UMR 5130 - IMEP-LAHC (Institut de Microélectronique, Electromagnétisme, Photonique – Laboratoire Hyperfréquences et Caractérisation) supervised by Philippe GALY, supervisor and Sorin CRISTOLOVEANU Co-supervisor.