Defense of a doctoral thesis ofVictoria NASSERDDINE, for the University Grenoble Alpes , speciality "NANO ELECTRONIC & NANO TECHNOLOGIES ", entitled:
Room Z-404 (4th floor) Phelma/Minatec 3 rue parvis Louis Néel 38016 Grenoble cedex1
« Millimetre-wave phase shifters based on tunable transmission lines in MEMS technology post-CMOS process »
Thursday, December 15th, 2016 at 9:30
This work focuses on the design of millimeter-wave phase shifters based on a new topology of tunable transmission lines named Tunable Slow wave CoPlanar Waveguide (TS-CPW). TS-CPW uses, on one side, the slow wave phenomenon in order to miniaturize longitudinally the transmission line and to show a better quality factor than its integrated microstrip transmission line counterpart and, on the other side, the MEMS approach to achieve tunability of the transmission line with a good figure-of-merit. First, the topology, the design and the electromagnetic simulations of the TS-CPW based on MEMS (Micro Electro Mechanical system) are presented in a BiCMOS technology. Next, phase shifters with 3-bit of resolution based on TS-CPWs are developed at 60 GHz with two different values of total phase shift (157.5° and 315°). These TS-CPWs and phase shifters were fabricated in IHP’s 0.25 µm BiCMOS technology and measured on the vector network analyzers of IHP and IMEP-LaHC.
Key words : Transmission line S-CPW, slow wave, tunable transmission line TS-CPW, phase shifters, figure-of-merit, MEMS, millimeter wave band, 0.25 µm BiCMOS technology.
Members of jury : - Mr Philippe FERRARI: Supervisor - Florence PODEVIN: Co-Supervisor - Skandar BASROUR: Examiner - Boudjemaa REMAKI: Examiner - Mehmet kAYNAK: Examiner - Didier VINCENT: Reviewer - Fabio COCCTTI: Reviewer
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Thesis prepared in the laboratory : UMR 5130 - IMEP-LAHC (Institut de Microélectronique, Electromagnétisme, Photonique – Laboratoire Hyperfréquences et Caractérisation) supervised by Philippe FERRARI .