Electromagnetism

Contact : Magali ASTIC

Researchers based at the IMEP-LAHC Savoyard site have a set of equipment for radiofrequency and microwave characterization.
Solutions for 4-port network analysis up to 65 GHz and 2-port analysis up to 110 GHz and spectral analysis up to 30 GHz are available.
A sampling oscilloscope makes it possible to perform subnanosecond temporal analyzes. These devices can be used in combination with a manual probing station for the characterization of wafers up to 8 "(200 mm) or with an Elite 300 semi-automatic station (Cascade Microtech) for ambient temperature measurements. or up to 300°C for wafers up to 300 mm.

Available equipements :

• Measuring devices

     








- 1 Precision Source / Measure Unit Agilent B2902A (100  fA).
- 1 impedance meter 4294 A (40 Hz-110 MHz).
- 1 spectrum analyser Anritsu MS2667C (9 kHz - 30 GHz).




 

• Probe systems

- 1 manual station PM8 Suss Microtec for probing wafers up to 200 mm
                        







- 1 semi automatic probing station Elite 300 Cascade Microtech for wafers up to 300 mm diameter, possibility to perform measurements at room temperature or up to 300°C