Researchers based at the IMEP-LAHC Savoyard site have a set of equipment for radiofrequency and microwave characterization.
Solutions for 4-port network analysis up to 65 GHz and 2-port analysis up to 110 GHz and spectral analysis up to 30 GHz are available.
A sampling oscilloscope makes it possible to perform subnanosecond temporal analyzes. These devices can be used in combination with a manual probing station for the characterization of wafers up to 8 "(200 mm) or with an Elite 300 semi-automatic station (Cascade Microtech) for ambient temperature measurements. or up to 300°C for wafers up to 300 mm.
Available equipements :
- 1 network analyser Anritsu 37397 C (40 MHz-65 GHz).
- 1 network analyser 4 ports PNA-X Agilent N5247A (10 MHz-67 GHz) plus extension composed by Agilent 4 ports N5262A controler and 2 millimetric heads OML N5250CX10-L20 (Left Combiner head with adj Atten and Bias Tee) & N5250CX10-R20(Right combiner head with Bias Tee, no adj Atten) allowing wide band 2 ports measurements until 110 GHz